Charged particle gun and charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorTomoyo Sasaki
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AssigneeHitachi High-Tech Corporation
InventorTomoyo Sasaki
Estimating the term…
The present disclosure provides a charged particle beam device capable of simultaneously achieving protection of a charged particle source against electrical discharging inside a charged particle gun and highly accurate control of the charged particle gun, for both DC and AC components. A charged particle gun according to the present disclosure is configured such that an extraction voltage and an acceleration voltage are superposed and supplied to a charged particle beam source, a wiring between the charged particle beam source and a voltage circuit is covered with first and second enclosures, the first enclosure is configured to be connected to an extraction electrode, and the second enclosure is configured to be connected to an acceleration electrode and to a reference voltage of the voltage circuit.
A charged particle gun configured to irradiate a sample with a charged particle beam, the charged particle gun comprising:
Dependencies are inferred from the claim text.