Electron exit window foil for electron beam emitter
AssigneeTetra Laval Holdings & Finance S.A.
InventorAlaa Omrane
Life of this patent
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Abstract
An electron exit window foil for an electron beam emitter having an electron beam generator and operating in a corrosive environment. The electron exit window foil has a sandwich structure with an outer side arranged to face the corrosive environment and an inner side arranged to face the electron beam generator. The sandwich structure comprises, as seen from the outer side to the inner side, a protective layer, for protecting the sandwich structure from the corrosive environment, a supporting layer made of Ti, for providing structural support for the sandwich structure, and a thermally conductive layer made of Al, for conveying heat from the sandwich structure.
Claims19
An electron exit window foil for an electron beam emitter having an electron beam generator and operating in a corrosive environment, the electron exit window foil having a sandwich structure with an outer side arranged to face the corrosive environment and an inner side arranged to face the electron beam generator, the sandwich structure comprising, as seen from the outer side to the inner side,
- a protective layer comprising metal, for protecting the sandwich structure from the corrosive environment,
- a supporting layer made of Ti, for providing structural support for the sandwich structure,
- a thermally conductive layer made of Al, for conveying heat from the sandwich structure, the Al layer including one side facing away from the Ti layer and an opposite side facing toward the Ti layer;
- and
- the sandwich structure comprising a layer made of ZrO2 that is arranged on the Al layer, on the one side of the Al layer that faces away from the Ti layer and that is arranged to face the electron beam generator.
An electron exit window foil for an electron beam emitter having an electron beam generator and operating in a corrosive environment, the electron exit window foil having a sandwich structure with an outer side arranged to face the corrosive environment and an inner side arranged to face the electron beam generator, the sandwich structure comprising, as seen from the outer side to the inner side,
- a protective layer comprising metal for protecting the sandwich structure from the corrosive environment, the protective layer being an outermost layer of the electron exit window foil;
- a supporting layer made of Ti providing structural support for the sandwich structure;
- a thermally conductive layer made of Al that conveys heat from the sandwich structure, the Al layer including one side facing away from the Ti layer and an opposite side facing toward the Ti layer;
- and
- a layer made of ZrO2 that is arranged on the Al layer and on the one side of the Al layer that faces away from the Ti layer and that is arranged to face the electron beam generator so that the ZrO2 layer is an innermost layer of the electron exit window foil, the ZrO2 layer having a thickness of 100 nm to 200 nm.
Dependencies are inferred from the claim text.