Method and system for writing voxels to a transparent substrate

A computer program product comprising instructions embodied on a non-transitory computer-readable medium which, when executed by one or more processors operably linked to a laser writing system comprising a pulsed laser source, an amplitude modulator arranged to receive laser pulses from the pulsed laser source, and a photodetector, causes the laser writing system to perform a method comprising:

• forming a first voxel at a first position in a substrate using a first laser pulse;
• detecting, using the photodetector, light emitted or scattered by the substrate as a result of forming the first voxel;
• determining whether the detected light satisfies a predetermined constraint;
• in response to determining that the detected light does not satisfy the predetermined constraint, adjusting an amplitude of a second laser pulse.

A system, comprising:

• a pulsed laser source;
• a first amplitude modulator downstream of the pulsed laser source along an optical path;
• a beam scanner arranged on the optical path downstream of the first amplitude modulator;
• a sample stage to hold a substrate in the optical path downstream of the beam scanner and amplitude modulator;
• a detector to detect light emitted or scattered by the substrate as a result of formation of a voxel in the substrate;
• and
• a controller to control the system to perform a method comprising:
• forming a first voxel at a first position in the substrate using a first laser pulse;
• detecting light emitted or scattered by the substrate as a result of forming the first voxel;
• determining whether the detected light satisfies a predetermined constraint;
• in response to determining that the detected light does not satisfy the predetermined constraint, adjusting an amplitude of a second laser pulse.