Wide angle application high reflective mirror
AssigneeII-Vi Delaware, Inc.
InventorsLi Wu, Zhe Liu, Guanglong Yu, Yu Li, Yan Su, Zhiqiang Lin
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Abstract
Provided is a wide angle application high reflective mirror having a reflection band partially overlapping in a wavelength range of 800-4000 nm. The mirror comprises a film system in which a plurality of high refractive index film layers and a plurality of low refractive index film layers that are alternately stacked, and the material of the high refractive index film layer is one of SiH, SiOxHy, or SiOxNy, or a mixture thereof. The highly reflective mirror can achieve a reflectance greater than 99% with an incident angle ranging from 0 to 60 degrees over a large angle range.
Claims9
A wide angle application high reflective mirror having a reflection band partially overlapping in a wavelength range of 800 to 4000 nm, wherein the high reflective mirror comprises:
- a plurality of high refractive index film layers and a plurality of low refractive index film layers alternately stacked, a material of the high refractive index film layers includes one of (i) SiOxHy or SiOxNy, or (ii) a mixture at least two of SiH, SiOxHy, or SiOxNy
- wherein each of the plurality of high refractive index film layers has a refractive index of greater than 3 in the wavelength range of 800 to 4000 nm and the reflection band has a reflectance of greater than 99% within the wavelength range of 850 to 950 nm with an incident angle ranging from 0 to 60 degrees over a large angle range.
Dependencies are inferred from the claim text.