Measuring system, measuring device, and measuring method

A measuring device that acquires a measurement value indicating electrostatic capacitance between the measuring device and an object,

• wherein the object includes a body on which the measuring device is loaded in order to transport the measuring device, and an electrode provided on the body,
• the measuring device includes:
• a disc-shaped base board;
• a sensor provided along a bottom surface of the disc-shaped base board;
• and
• a circuit board installed on the disc-shaped base board and connected to the sensor, and the sensor includes:
• a central electrode having an area smaller than that of the electrode of the object and configured to acquire electrostatic capacitance for reflecting a distance with the electrode;
• and
• three or more peripheral electrodes disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the electrode of the object.

A measuring method for acquiring a measurement value indicating electrostatic capacitance between a measuring device and an object,

• in which the object includes a body on which the measuring device is loaded in order to transport the measuring device, and a target electrode provided on the body,
• the measuring device includes:
• a disc-shaped base board;
• a sensor provided along a bottom surface of the disc-shaped base board;
• and
• a circuit board installed on the disc-shaped base board and connected to the sensor,
• the sensor includes:
• a central electrode having an area smaller than that of the target electrode of the object and configured to acquire electrostatic capacitance for reflecting a distance with the target electrode;
• and
• three or more peripheral electrodes disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the target electrode of the object,
• the method comprising:
• holding the measuring device by the object so that the measuring device is loaded on the object;
• and
• acquiring a plurality of measurement values, which indicate electrostatic capacitance, based on each of voltage amplitudes in the central electrode and the three or more peripheral electrodes by applying a radio frequency signal to the central electrode and the three or more peripheral electrodes, in a state where the measuring device is loaded on the object.