Vibration damping apparatus, reaction force processing system, stage apparatus, exposure apparatus, substrate processing device, and method for manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorMasamichi Ueno
Life of this patent
Estimating the term…
Abstract
A vibration damping apparatus configured to damp a vibration of a target member includes a mass body, a base disposed on the target member, a support member disposed on the base and configured to support the mass body, a housing disposed on the base so as to surround the support member, an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member, and a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
Claims16
A vibration damping apparatus configured to damping a vibration of a target member, the vibration damping apparatus comprising:
- a mass body;
- a base disposed on the target member;
- a support member disposed on the base and configured to support the mass body;
- a housing disposed on the base so as to surround the support member;
- an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member;
- and
- a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
A reaction force processing system comprising:
- a vibration damping apparatus;
- a coil;
- and
- a magnet,
- wherein the vibration damping apparatus includes:
- a mass body;
- a base disposed on a target member;
- a support member disposed on the base and configured to support the mass body;
- a housing disposed on the base so as to surround the support member;
- an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member;
- and
- a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
A manufacturing method of an article, the manufacturing method comprising the steps of:
- processing a substrate using a substrate processing apparatus;
- and
- manufacturing the article from a processed substrate,
- wherein the substrate processing apparatus includes:
- a stage configured to hold the substrate;
- and
- a vibration damping apparatus configured to damp a vibration of the stage,
- wherein the vibration damping apparatus includes:
- a mass body;
- a base disposed on the stage;
- a support member disposed on the base and configured to support the mass body;
- a housing disposed on the base so as to surround the support member;
- an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member;
- and
- a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
Dependencies are inferred from the claim text.