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US 12,264,391 B2Granted
Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device
AssigneeSamsung Display Co., Ltd.
InventorWonje Cho
Life of this patent
Estimating the term…
Abstract
An apparatus for manufacturing a display device includes a mask assembly, the mask assembly including a silicon substrate having a first surface, a second surface opposite the first surface, and a first opening portion penetrating the first surface and the second surface, and a support substrate on the second surface, the support substrate having a second opening portion connected to the first opening portion. The first opening portion at the first surface is less in width than the first opening portion at the second surface.
Claims10
An apparatus for manufacturing a display device, the apparatus comprising:
- a mask assembly, the mask assembly comprising:
- a plurality of silicon substrates, each silicon substrate of the plurality of silicon substrates comprising a first surface, a second surface opposite to the first surface, and a first opening portion penetrating the first surface and the second surface;
- a support substrate on the second surface, the support substrate comprising a second opening portion connected to the first opening portion, and
- a mask sheet comprising a plurality of mask opening portions, each silicon substrate being aligned with a corresponding one of the plurality of mask opening portions, and the support substrate being between the mask sheet and the plurality of silicon substrates,
- wherein the first opening portion at the first surface is less in width than the first opening portion at the second surface.
2 more elements
Dependencies are inferred from the claim text.