Optical detection for bio-entities
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAllen Timothy Chang, Yi-Hsien Chang, Chun-Ren Cheng
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Abstract
An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a fluidic channel, wherein a first side of the fluidic channel is formed on the lower substrate and a second side of the fluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry.
Claims20
A device comprising:
- a first semiconductor substrate;
- an inter-level dielectric (ILD) layer over the first semiconductor substrate;
- a first electrode and a second electrode disposed on the ILD layer;
- a first hydrophobic coating layer disposed on the ILD layer, the first electrode and the second electrode;
- a surface treated structure disposed on the ILD layer between the first electrode and the second electrode;
- an optical signal conduit in communication with the surface treated structure to provide an optical signal to the surface treated structure;
- a photosensor array disposed in the first semiconductor substrate;
- a third electrode disposed over the surface treated structure;
- a second hydrophobic coating layer disposed on the third electrode;
- and
- a fluidic channel, disposed between the first and second hydrophobic layers, wherein movement of fluid through the fluidic channel is controlled by electric fields associated with the first, second and third electrodes.
A device comprising:
- an inter-level dielectric (ILD) layer over a first substrate,
- a first electrode disposed on the ILD layer;
- a first hydrophobic coating layer disposed on the first electrode;
- a surface treated structure disposed over the ILD layer;
- an optical signal conduit in communication with the surface treated structure;
- a second electrode disposed over and covering the surface treated structure, the second electrode formed of a non-transparent material;
- a second hydrophobic coating layer disposed on the second electrode;
- a fluidic channel, disposed between the first and second hydrophobic layers, wherein movement of fluid through the fluidic channel is controlled by electric fields associated with the first and second electrodes;
- and
- a photosensor disposed on the first substrate and below the first hydrophobic coating layer and the ILD layer, the photosensor being configured to detect an emission occurring on the surface treated structure.
A method comprising:
- moving, via an electrowetting-on-dielectric process, a sample through a fluidic channel to a surface treatment area over an inter-level dielectric (ILD) layer, wherein a non-transparent electrode is disposed over the surface treatment area;
- and
- detecting, using a photosensor disposed in a substrate disposed below the ILD layer, a photonic signal by a photodetector, the photonic signal produced by an interaction of the sample and the surface treatment area.
Dependencies are inferred from the claim text.