Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride
AssigneeCentral Glass Company, Limited
InventorsTakashi Suenaga, Takuya Kita, Ryuichi Nakamura
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Abstract
A tungsten hexafluoride manufacturing method of the present invention includes a reaction step of reacting tungsten with a gas of a fluorine element-containing compound so as to obtain a mixture that contains tungsten hexafluoride and hydrogen fluoride-containing impurities, and a discharge step of performing distillation of the mixture while performing a discharge operation at least two or more times during the distillation so as to obtain tungsten hexafluoride, the discharge operation being an operation in which a storage operation and a purge operation are alternately performed.
Claims12
A tungsten hexafluoride manufacturing method, comprising:
- a reaction step of reacting tungsten with a gas of a fluorine element-containing compound so as to obtain a mixture that contains tungsten hexafluoride and hydrogen fluoride-containing impurities;
- and
- a discharge step of performing distillation of the mixture while performing a discharge operation at least two or more times during the distillation so as to obtain tungsten hexafluoride, the discharge operation being an operation in which the following storage operation and purge operation are alternately performed,
- (operation)
- storage operation:
- an operation of creating a total reflux state in a distillation column and then obtaining a mixture gas containing the concentrated hydrogen fluoride in a gas phase portion in the distillation column, and
- purge operation:
- an operation of purging the mixture gas from an upper portion of a condenser provided in the gas phase portion and then stopping the purging.
A tungsten hexafluoride purification method, comprising:
- a discharge step of performing distillation of a mixture that contains hydrogen fluoride-containing impurities and tungsten hexafluoride while performing a discharge operation at least two or more times during the distillation so as to obtain tungsten hexafluoride, the discharge operation being an operation in which the following storage operation and purge operation are alternately performed,
- (operation)
- storage operation:
- an operation of creating a total reflux state in a distillation column and then obtaining a mixture gas containing the concentrated hydrogen fluoride in a gas phase portion in the distillation column, and
- purge operation:
- an operation of purging the mixture gas from an upper portion of a condenser provided in the gas phase portion and then stopping the purging.
Dependencies are inferred from the claim text.