Gas solution supply device
AssigneeEbara Corporation
InventorsSuguru Ozawa, Yuji Araki, Toshifumi Watanabe, Yoichi Nakagawa, Risa Kimura, Tao Xu
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AssigneeEbara Corporation
InventorsSuguru Ozawa, Yuji Araki, Toshifumi Watanabe, Yoichi Nakagawa, Risa Kimura, Tao Xu
Estimating the term…
A gas solution supply device 1 includes: a first gas-liquid separator 8 in which gas solution is stored; a second gas-liquid separator 16 provided at a stage subsequent to the first gas-liquid separator 8 and in which gas solution to be supplied to a use point is stored; an intermediate line 17 provided between the first gas-liquid separator 8 and the second gas-liquid separator 16; a pressure booster pump 18 provided on the intermediate line 17 and increases a pressure of gas solution being supplied from the first gas-liquid separator 8 to the second gas-liquid separator 16; a gas supply line 2 that supplies gas as a material of the gas solution; and a gas dissolving unit 20 provided on the intermediate line 17 and dissolves the gas supplied from the gas supply line 2 in the gas solution supplied from the first gas-liquid separator 8.
A gas solution supply device comprising:
Dependencies are inferred from the claim text.