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US 12,262,481 B2Granted
Electrical devices with electrodes on softening polymers and methods of manufacturing thereof
AssigneeBoard of Regents, The University of Texas System
InventorsRomil Modi, Jonathan Reeder, Gregory T. Ellson, Walter E. Voit, Alexandra Joshi Imre
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Abstract
A method of manufacturing an electrical device, comprising: forming a patterned inorganic liftoff layer to expose a target electrode site on a softening polymer layer, depositing an electrode layer on the inorganic liftoff layer and on the exposed target electrode site, and removing the inorganic liftoff layer by a horizontal liftoff etch to leave the electrode layer on the exposed target electrode site.
Claims8
A method of manufacturing an electrical device, comprising:
- forming a patterned inorganic liftoff layer to expose a target electrode site on a softening polymer layer;
- depositing an electrode layer on the inorganic liftoff layer and on the exposed target electrode site;
- and
- removing the inorganic liftoff layer by a horizontal liftoff etch to leave the electrode layer on the exposed target electrode site.
1 more element
Dependencies are inferred from the claim text.