Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Ting Yang, Li-Jen Ko, Hsiang Yin Shen
Life of this patent
Estimating the term…
Abstract
A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of the semiconductor manufacturing apparatus.
Claims20
A semiconductor manufacturing system, comprising:
- at least one semiconductor manufacturing apparatus, comprising:
- a series of manufacturing units configured to perform manufacturing operations on wafers;
- a first control unit configured to control the manufacturing operations of the series of manufacturing units, and generate log data recording the manufacturing operations of the series of manufacturing units;
- and
- a first storage device cooperatively connected to the first control unit and configured to store the log data transferred from the first control unit;
- and
- a behavior recognition device cooperatively connected to the semiconductor manufacturing apparatus, the behavior recognition device comprising:
- a second storage device cooperatively connected to the first control unit of the semiconductor manufacturing apparatus, and configured to store the log data transferred from the first control unit;
- and
- a second control unit cooperatively connected to the second storage device, and configured to receive the log data from the second storage device and build a transition state model to analyze behaviors related to the manufacturing operations of the series of manufacturing units based on the log data;
- wherein the behavior recognition device is further configured to reproduce an abnormal behavior of the behaviors by performing a simulation based on the transition state model, and adjust a control rule of the manufacturing units according to the reproduced abnormal behavior;
- and the semiconductor manufacturing apparatus is configured to manufacture a plurality of processed wafers according to the adjusted control rule.
A semiconductor manufacturing method, comprising:
- receiving, by a storage device, inputs of log data recording manufacturing operations of a series of manufacturing units of at least one semiconductor manufacturing apparatus performed on a plurality of wafers;
- and
- building a transition state model, by a control unit, based on the log data to:
- identify a bad behavior from behaviors related to wafer transfer sequences and activities of the manufacturing operations of the series of manufacturing units based on the log data;
- reproduce the bad behavior by performing a simulation based on the transition state model;
- adjust a control rule of the manufacturing units according to the reproduced bad behavior;
- and
- manufacture a plurality of processed wafers by utilizing the adjusted control rule to perform the manufacturing operations of the series of the manufacturing units.
A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus, comprising:
- a storage device configured to store log data of the semiconductor manufacturing apparatus;
- and
- a control unit cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of a plurality of manufacturing units of the semiconductor manufacturing apparatus;
- wherein the control unit is further configured to perform a simulation based on the transition state model to thereby reproduce an abnormal behavior of the behaviors of the manufacturing units, and adjust a control rule of the manufacturing units according to the reproduced abnormal behavior.
Dependencies are inferred from the claim text.