Low hysteresis and flexible pressure sensitive composite
AssigneeNational University of Singapore
InventorsChee Keong Tee, Haicheng Yao, Weidong Yang, Yu Jun Tan
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Abstract
A sensing structure and a method of fabricating a sensing structure for a compressive-type pressure sensor. The method comprises the steps of providing an elastic micropatterned substrate defining a plurality of 3-dimensional microstructures, each microstructure comprising a tip portion pointing away from the substrate in a first direction; forming a conductive film on the elastic micropatterned substrate such that the 3-dimensional microstructures are substantially covered by the conductive film; and forming cracks in the conductive film in areas on 3-dimensional microstructures.
Claims17
A sensing structure for a compressive-type pressure sensor, the sensing structure comprising:
- an elastic micropatterned substrate defining a plurality of 3-dimensional microstructures, each microstructure comprising a tip portion pointing away from the substrate in a first direction;
- and
- a conductive film on the elastic micropatterned substrate such that the 3-dimensional microstructures are substantially covered by the conductive film, wherein the conductive film comprises cracks in areas on 3-dimensional microstructures;
- wherein the conductive film is free from cracks at the tip portions of the 3-dimensional microstructures.
Dependencies are inferred from the claim text.