Precursor delivery systems, precursor supply packages, and related methods
AssigneeEntegris, Inc.
InventorPaolo Moreschini
Life of this patent
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Abstract
Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal decomposition of the solid precursor material may produce a gas precursor. The gas precursor may be supplied to a gas precursor-utilizing process. Further embodiments relate to precursor supply packages and related methods.
Claims9
A precursor delivery system comprising:
- a plurality of precursor supply packages, each of the plurality of precursor supply packages comprising:
- a vessel body containing a solid precursor material, wherein the solid precursor material has a formula MPF6, wherein M is Li, Na, K, Rb, Cs, or Ag;
- a heater configured to heat the vessel body to a temperature sufficient to produce a gas precursor by thermal decomposition of the solid precursor material wherein the gas precursor comprises PF5;
- and
- an outlet fluidly connected to the vessel body;
- a manifold fluidly connected to the plurality of precursor supply packages;
- and an outlet fluidly connected to the manifold;
- the manifold is configured to switch from withdrawing the gas precursor from one of the precursor supply packages to withdrawing the gas precursor from another of the precursor supply packages in response to a pressure sensing signal, wherein the pressure sensing signal is configured to initiate heating to the another precursor supply package.
Dependencies are inferred from the claim text.