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US 12,257,666 B2Granted
Surface height measurement method using dummy disk
AssigneeEbara Corporation
InventorsHiroyuki Shinozaki, Yasuyuki Motoshima
Life of this patent
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Abstract
A method is provided and includes making a polishing table and a dummy disk rotate; bringing the dummy disk into contact with a table surface of the polishing table while a liquid is supplied to the table surface; measuring heights of the table surface at a plurality of measurement points while the dummy disk is moved on the table surface; and creating a table profile showing tilt of the table surface from measurement values of the heights of the table surface.
Claims4
A method, performing by a data processing portion, comprising:
- making a polishing table and a dummy disk rotate;
- bringing the dummy disk into contact with a table surface of the polishing table while a liquid is supplied to the table surface;
- measuring heights of the table surface at a plurality of measurement points while the dummy disk is moved on the table surface;
- creating a table profile showing tilt of the table surface from measurement values of the heights of the table surface;
- calculating a tilt angle of the table profile with respect to a horizontal line that is a virtual line indicating a horizontal direction of the polishing table;
- correcting the table profile by that the data processing portion make the table profile rotate with respect to the horizontal line until the tilt angle is 0°;
- rotating the polishing pad arranged on the table surface along with the polishing table, and rotating the dressing disk;
- bringing the dressing disk into contact with a polishing surface of the polishing pad while the liquid is supplied to the polishing surface;
- measuring heights of the polishing surface at a plurality of measurement points while the dressing disk is moved on the polishing surface;
- and
- creating an initial pad profile showing a height distribution of the polishing surface from measurement values of the heights of the polishing surface,
- wherein the dummy disk is fixed to a disk holder of a dresser when the heights of the table surface of the polishing table are measured,
- the dummy disk comprises:
- a first surface capable of coming into contact with the disk holder;
- and
- a second surface which is on an opposite side of the first surface,
- wherein the second surface has a plurality of liquid discharge channels, and
- the plurality of liquid discharge channels extends from one end of the second surface to the other end,
- wherein the dressing disk is fixed to the disk holder of the dresser when the polishing surface of the polishing pad is dressed, and the dressing disk comprises:
- a first surface capable of coming into contact with the disk holder;
- and
- a second surface which is on an opposite side of the first surface of the dressing disk,
- wherein the second surface of the dressing disk has a plurality of protrusion portions and the plurality of liquid discharge channels positioned between the plurality of protrusion portions,
- the plurality of liquid discharge channels extends from one end of the second surface to the other end, and
- abrasive grains are fixed to surfaces of the plurality of protrusion portions.
22 more elements
A method, performing by a data processing portion, comprising:
- making a first polishing table and a dummy disk rotate;
- bringing the dummy disk into contact with a first table surface of the first polishing table while a liquid is supplied to the first table surface;
- measuring heights of the first table surface at a plurality of measurement points while the dummy disk is moved on the first table surface;
- creating a first table profile showing tilt of the first table surface from measurement values of the heights of the first table surface;
- calculating a tilt angle of the first table profile with respect to a horizontal line that is a virtual line indicating a horizontal direction of the polishing table;
- correcting the first table profile by rotating the first table profile until the tilt angle is 0;
- rotating a second polishing table and the dummy disk;
- bringing the dummy disk into contact with a second table surface of the second polishing table while the liquid is supplied to the second table surface;
- measuring heights of the second table surface at a plurality of measurement points while the dummy disk is moved on the second table surface;
- creating a second table profile showing tilt of the second table surface from measurement values of the heights of the second table surface;
- calculating a tilt angle of the second table profile with respect to the horizontal line;
- and
- correcting the second table profile by rotating the second table profile until the tilt angle of the second table profile is 0°,
- wherein the dummy disk is fixed to a disk holder of a dresser when heights of the first table surface of the polishing table are measured,
- the dummy disk comprises:
- a first surface capable of coming into contact with the disk holder;
- and
- a second surface which is on an opposite side of the first surface of the dummy disk,
- wherein the second surface dummy disk has a plurality of liquid discharge channels, and
- the plurality of liquid discharge channels extends from one end of the second surface to the other end.
17 more elements
Dependencies are inferred from the claim text.