Piezoelectric bending actuator drive for use in a moist environment
AssigneePI Ceramic GmbH
InventorsBenjamin Dargatz, Kevin Speer, Bernd Broich
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Abstract
The disclosure relates to a piezoelectric drive, such as for permanently protected use in a moist environment, which includes a housing having a chamber, which chamber is hermetically sealed by at least one elastic membrane, and includes a piezoelectric drive unit in the hermetically sealed chamber for driving a drive element. The piezoelectric drive unit can include at least one piezoelectric bending actuator, which produces a bending deflection transversely to the elastic membrane when electrically activated. For example, two bending actuators can be arranged in series or parallel.
Claims21
A piezoelectric drive, configured for use in a moist environment, the piezoelectric drive comprising:
- a housing having a chamber, which is hermetically sealed by an elastic membrane, wherein the elastic membrane is fixedly connected to the housing such that the hermetic seal is formed;
- and
- a piezoelectric drive unit arranged in the hermetically sealed chamber and configured to be piezoelectrically deformed by electric actuation for driving a drive element, wherein the piezoelectric drive unit includes at least one piezoelectric bending actuator, which is constituted by at least one piezocontractor applied to a substrate, for generating, when electrically actuated, a bending deflection transversely to the elastic membrane,
- wherein the piezoelectric drive unit is connected to the elastic membrane and the housing, and is configured to be coupled to or is coupled, via a form fit, to the drive element arranged outside the chamber.
Dependencies are inferred from the claim text.