Surface elastic wave filter with resonant cavities
AssigneeSoitec
InventorsEric Michoulier, Sylvain Ballandras, Thierry LaRoche
Life of this patent
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Abstract
A surface elastic wave filter has resonant cavities and comprises a composite substrate formed of a base substrate and a piezoelectric upper layer; at least one input electroacoustic transducer and an output electroacoustic transducer, arranged on the upper layer, and at least one internal reflecting structure, arranged between the input electroacoustic transducer and the output electroacoustic transducer. The internal reflecting structure comprises a first structure comprising at least one reflection grating having a first period and a second structure comprising at least one reflection grating having a second period, the first period being greater than the second period.
Claims13
A surface elastic wave filter with resonant cavities, comprising:
- a composite substrate formed of a base substrate and a piezoelectric upper layer;
- at least one input electroacoustic transducer and at least one output electroacoustic transducer, disposed on the piezoelectric upper layer;
- at least one internal reflective structure, arranged between the at least one input electroacoustic transducer and the at least one output electroacoustic transducer, the at least one internal reflective structure comprising:
- a first structure comprising at least one reflection grating having a first period;
- a second structure comprising at least one reflection grating having a second period, the first period being greater than the second period;
- wherein the at least one reflection grating of the first structure comprises a first plurality of reflection gratings separated from each other by a first distance, the at least one reflection grating of the second structure comprises a second plurality of reflection gratings separated from each other by a second distance, and wherein a distance separating the first structure and the second structure is equal to an arithmetic mean, to within 10%, of the first distance and the second distance.
Dependencies are inferred from the claim text.