Acoustic wave devices with common ceramic substrate
AssigneeSkyworks Global Pte. Ltd.
InventorsKwang Jae Shin, Hiroyuki Nakamura
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Abstract
An acoustic wave component is disclosed. The acoustic wave component can include a bulk acoustic wave resonator and a surface acoustic wave device. The bulk acoustic wave resonator can include a first portion of a ceramic substrate, a first piezoelectric layer positioned on the ceramic substrate, and electrodes positioned on opposing sides of the first piezoelectric layer. The surface acoustic wave device can include a second portion of the ceramic substrate, a second piezoelectric layer positioned on the ceramic substrate, and an interdigital transducer electrode on the second piezoelectric layer.
Claims21
An acoustic wave component comprising:
- a bulk acoustic wave resonator including an air cavity between at least a portion of a ceramic substrate and at least one electrode;
- and
- a surface acoustic wave device disposed in the air cavity, the surface acoustic wave device including a piezoelectric layer above the ceramic substrate, and an interdigital transducer electrode above the piezoelectric layer.
A multiplexer comprising:
- a first filter including a bulk acoustic wave resonator, the bulk acoustic wave resonator including an air cavity between at least a portion of a ceramic substrate and at least one electrode;
- and
- a second filter coupled to the first filter at a common node, the second filter including a surface acoustic wave device disposed in the air cavity, the surface acoustic wave device including a piezoelectric layer on the ceramic substrate, and an interdigital transducer electrode above the piezoelectric layer.
An acoustic wave component comprising:
- a film bulk acoustic wave resonator including an air cavity between at least a portion of a ceramic substrate and at least one electrode;
- and
- another type of acoustic wave resonator disposed in the air cavity.
Dependencies are inferred from the claim text.