Methods and systems for real-time quality control of a film in a spin coating process

A system for determining a quality of a film in a spin coating process, the system comprising:

• a plurality of single pixel cameras (SPCs) configured to capture images of a plurality of portions of the film while coating the film on a substrate using a spinner, wherein the images of the plurality of portions of the film correspond to a sample of the film that is less than an entirety of the film;
• and
• a film quality controller configured to:
• perform a compressive sensing routine to generate an image of the film based on the images of the plurality of portions of the film and a transfer matrix, wherein the image of the film corresponds to the entirety of the film, and wherein the transfer matrix is based on a plurality of training images of the entirety of the film that are captured by an imaging device that is different from the plurality of SPCs;
• determine whether the film has a target characteristic based on the image of the film;
• and
• selectively modify at least one parameter of the spin coating process based on a determination of whether the film has the target characteristic.

A system for determining a quality of a film in a spin coating process, the system comprising:

• an imaging device comprising a plurality of Single Pixel Cameras (SPCs) and at least one of a lens or a Spatial Light Modulator (SLM), wherein the imaging device is configured to capture images of a plurality of portions of the film while coating the film on a substrate using a spinner, and wherein the images of the plurality of portions of the film correspond to a sample of the film that is less than an entirety of the film;
• and
• a film quality controller configured to:
• perform a compressive sensing routine to generate an image of the film based on the images of the plurality of portions of the film and a transfer matrix, wherein the image of the film corresponds to the entirety of the film, and wherein the transfer matrix is based on a plurality of training images of the entirety of the film that are captured by an imaging device that is different from the plurality of SPCs;
• generate a heat map based on the image of the film;
• determine whether the film has a target characteristic based on the heat map;
• determine at least one parameter of the spin coating process in response to determining that the heat map does not have the target characteristic;
• estimate a thickness of the film at an end of the spin coating process based on the at least one parameter;
• and
• modify the at least one parameter of the spin coating process to form the film having a target thickness at the end of the spin coating process based on the thickness that was estimated.