US 12,253,089 B2 · Vacuum pump

Abstract

A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portion 201 in which a Siegbahn spiral groove portion 262 is provided in at least either rotating discs 220a to 220c or stator discs 219a and 219b, and a Holweck type exhaust mechanism portion 301 in which a thread groove 131a is provided in at least either a cylindrical portion 102d of a rotating body 103 or a threaded spacer 131, and the Holweck type exhaust mechanism portion 301 is located on the downstream side of the Siegbahn type exhaust mechanism portion 201. The Holweck type exhaust mechanism portion 301 has a flow passage depth that is continuously constant at a predetermined depth H2, and the Siegbahn type exhaust mechanism portion 201 includes a region that is continuously constant at the predetermined depth H2 from a predetermined position.

Claims2

Dependent claims

A vacuum pump comprising:

a Siegbahn exhaust mechanism in which a spiral groove is provided in at least one of a rotating disc and a stator disc;
and
a Holweck exhaust mechanism in which a helical groove is provided in at least one of a rotating cylinder and a stator cylinder,
the Holweck exhaust mechanism being located on a downstream side of the Siegbahn exhaust mechanism, wherein
the Holweck exhaust mechanism has a flow passage depth that is continuously constant at a predetermined depth,
the Siegbahn exhaust mechanism includes a plurality of Siegbahn exhaust mechanisms in multiple stages, and
a flow passage depth portion of a lowest stage Siegbahn exhaust mechanism from among the plurality of Siegbahn exhaust mechanisms is the same as a flow passage depth portion of the Holweck exhaust mechanism at the predetermined depth, the lowest stage Siegbahn exhaust mechanism connected to the Holweck exhaust mechanism.

4 more elements

Dependencies are inferred from the claim text.

Vacuum pump

Life of this patent

Vacuum pump

Life of this patent

Abstract

Claims2