Quartz glass crucible
AssigneeSumco Corporation
InventorsHiroshi Kishi, Kouta Hasebe, Takahiro Abe, Hideki Fujiwara
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AssigneeSumco Corporation
InventorsHiroshi Kishi, Kouta Hasebe, Takahiro Abe, Hideki Fujiwara
Estimating the term…
A quartz glass crucible 1 includes: a quartz glass crucible body 10 having a cylindrical side wall portion 10a, a curved bottom portion 10b, and a corner portion 10c which has a larger curvature than that of the bottom portion 10b and connects the side wall portion 10a and the bottom portion 10b to each other; and an inner-surface coating film 13A which contains a crystallization accelerator and is formed on an inner surface 10i of the quartz glass crucible body 10, in which the inner surface 10i of the quartz glass crucible body 10 is under compressive stress. The quartz glass crucible has high durability even at a high temperature during a single crystal pull-up step and is capable of reducing a generation ratio of pinholes in a silicon single crystal.
A quartz glass crucible comprising:
A quartz glass crucible comprising:
Dependencies are inferred from the claim text.