Nano-coating protection method for electrical devices
AssigneeJiangsu Favored Nanotechnology Co., Ltd.
InventorJian Zong
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Abstract
Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape to a central axis. A rotation rack may be operable to rotate about the central axis of the vacuum chamber. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber in a substantially symmetrical manner from the outer perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a polymeric multi-layer coating on surfaces of the one or more devices. Each layer may have a different composition of atoms to enhance the water resistance, corrosion resistance, and fiction resistance of the polymeric multi-layer coating.
Claims16
A method for applying a multi-layer coating on an electrical device in a reaction chamber, the method comprising, for at least a transition layer of the multi-layer coating deposited on the electrical device and a surface layer deposited on the transition layer:
- applying a periodic electrical discharge to a metal gate to periodically direct plasma from a discharge cavity into the reaction chamber to generate a reactive species, wherein the periodic electrical discharge includes:
- (1) a plasma-on period when electrical discharge is applied to the metal gate to direct plasma into the reaction chamber to generate a reactive species and a first polymeric sublayer is formed on the electrical device when the reactive species undergoes a fragmentation-polyrecombination process;
- and
- (2) a plasma-off period when electrical discharge is not applied to the metal gate, wherein a second polymeric sublayer is formed on the electrical device when the reactive species undergoes a radical chain propagation process,
- wherein the applying the periodic electrical discharge comprises controlling the plasma-on period and the plasma-off period such that the second polymeric sublayer occupies a greater portion of the transition layer or the surface layer than the first polymeric sublayer,
- wherein the multi-layer comprises a gradual structure in which a thickness of each layer decreases as compared to a previous layer.
Dependencies are inferred from the claim text.