Back to results
US 12,251,923 B2Granted
Joined body, holding device, and electrostatic chuck
AssigneeNiterra Co., Ltd.
InventorsOsamu Yoshimoto, Ryuichi Arakawa, Tomoo Tanaka
Life of this patent
Estimating the term…
Abstract
A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
Claims20
A joined body in which a first member and a second member are joined together via a joining layer, wherein
- the joining layer includes
- a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and
- a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
Dependencies are inferred from the claim text.