Apparatuses for handling microelectronic devices
AssigneeMicron Technology, Inc.
InventorsKuan Wei Tseng, Brandon P. Wirz
Life of this patent
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Abstract
An apparatus for handling microelectronic devices comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface.
Claims20
An apparatus for handling microelectronic devices, comprising:
- a control arm configured for receiving a microelectronic device thereon;
- a sensor device comprising one or more sensors carried by the control arm and configured to detect at least one pre-determined condition of the microelectronic device;
- and
- a controller in communication with the control arm and configured to reorient the microelectronic device carried on a surface of the control arm responsive to the sensor device detecting the at least one pre-determined condition.
An apparatus, comprising:
- a control device for receiving a microelectronic device on a surface thereof;
- a sensor device comprising multiple sensors adjacent to the surface of the control device, the sensor device configured to detect at least one condition comprising one or more of a magnitude and a location of force applied between one or more of:
- the control device and a microelectronic device on the surface of the control device;
- the microelectronic device and an additional microelectronic device;
- and
- the surface of the control device and a stack of microelectronic devices;
- and
- a controller in communication with the control device, the controller programmed to effectuate movement of the control device to cease responsive to the sensor device detecting the at least one condition.
An apparatus, comprising:
- a control device configured to move a microelectronic device from a first location to a second location;
- vacuum ports adjacent to a surface of the control device, the vacuum ports positioned to be placed adjacent to a facing surface of the microelectronic device;
- an array of sensors adjacent to the surface of the control device;
- and
- a controller operably coupled to the control device and configured to redirect movement of the microelectronic device responsive to a signal received from one or more sensors of the array of sensors.
Dependencies are inferred from the claim text.