Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool

A cleaning apparatus performing cleaning treatment for a PVA sponge used for substrate washing by causing the PVA sponge to contact with a cleaning member while supplying a washing liquid to the PVA sponge, the cleaning apparatus comprising:

• a pump that extracts the washing liquid remaining in the PVA sponge or the washing liquid flowing out from the PVA sponge in the cleaning treatment;
• a reserving tank that generates a first reagent by adding a PVA cross-linking agent and an iodine solution to the washing liquid extracted by the pump and generates a second reagent by adding a starch degrading enzyme to the first reagent, and
• a processor that detects coloration degrees of iodine color reactions on the first reagent and the second reagent and determines whether or not the cleaning of the PVA sponge is completed based on the detected coloration degrees.