Integrated circuit device, method, layout, and system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Zeng Kang, Wen-Shen Chou, Yung-Chow Peng
Life of this patent
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Abstract
An IC device includes a transistor including a gate structure between first and second active areas, a first S/D metal portion overlying the first active area, and a second S/D metal portion overlying the second active area. A load resistor including a third S/D metal portion is positioned on a dielectric layer and in a same layer as the first and second S/D metal portions. A first via overlies the first S/D metal portion, second and third vias overlie the third S/D metal portion, and a first conductive structure is configured to electrically connect the first via to the second via.
Claims20
An integrated circuit (IC) device comprising:
- a transistor comprising:
- a first gate structure extending in a first direction between first and second active areas;
- a first source/drain (S/D) metal portion extending in the first direction and overlying the first active area;
- and
- a second S/D metal portion extending in the first direction and overlying the second active area;
- a second gate structure extending in the first direction;
- a load resistor comprising a third S/D metal portion extending parallel to the second gate structure, adjacent to the second gate structure in a second direction perpendicular to the first direction, and positioned directly on a dielectric layer and in a same layer as the first and second S/D metal portions,
- wherein the first through third S/D metal portions comprise a same conductive material composition and a same height in a third direction perpendicular to the first and second directions;
- a first via overlying the first S/D metal portion;
- second and third vias overlying the third S/D metal portion;
- and
- a first conductive structure configured to electrically connect the first via to the second via.
A current mode logic (CML) circuit comprising:
- a first resistor comprising a first source/drain (S/D) metal portion extending in a first direction directly on a first dielectric layer located between a first pair of gate structures of a first row of gate structures aligned in a second direction perpendicular to the first direction;
- a second resistor comprising a second S/D metal portion extending in the first direction directly on a second dielectric layer located between a second pair of gate structures of the first row of gate structures;
- a first transistor comprising a first gate structure of a second row of gate structures, first and second S/D structures, a third S/D metal portion aligned with the first S/D metal portion in the first direction and positioned on the first S/D structure, and a fourth S/D metal portion on the second S/D structure;
- a second transistor comprising a second gate structure of the second row of gate structures, the second S/D structure, the fourth S/D metal portion, a third S/D structure, and a fifth S/D metal portion aligned with the second S/D metal portion in the first direction and positioned on the third S/D structure;
- a third transistor comprising a first gate structure of a third row of gate structures, fourth and fifth S/D structures, a sixth S/D metal portion on the fourth S/D structure, and a seventh S/D metal portion on the fifth S/D structure;
- and
- a fourth transistor comprising a second gate structure of the third row of gate structures, the fifth S/D structure, the seventh S/D metal portion, a sixth S/D structure, and an eighth S/D metal portion on the sixth S/D structure,
- wherein
- the first resistor and first, third and fourth transistors are coupled in series,
- the second resistor and second, third, and fourth transistors are coupled in series, and
- the first through eighth S/D metal portions are in a same layer and extend above each of the gate structures in a third direction perpendicular to each of the first and second directions.
An integrated circuit (IC) device comprising:
- a load resistor section comprising:
- a first resistor comprising a first source/drain (S/D) metal portion extending in a first direction directly on a first dielectric layer located between a first pair of gate structures in a first row of gate structures aligned in a second direction perpendicular to the first direction;
- and
- a second resistor comprising a second S/D metal portion extending in the first direction directly on a second dielectric layer located between a second pair of gate structures in the first row of gate structures;
- a switching transistor section comprising:
- a first transistor comprising third and fourth S/D metal portions adjacent to a first gate structure in a second row of gate structures, wherein the third S/D metal portion is aligned with the first S/D metal portion in the first direction and coupled to a first terminal of the first resistor;
- and
- a second transistor comprising fifth and sixth S/D metal portions adjacent to a second gate structure in the second row of gate structures, wherein the fifth S/D metal portion is aligned with the second S/D metal portion in the first direction and coupled to a first terminal of the second resistor;
- and
- a transistor stack section comprising:
- a plurality of transistors comprising a third transistor comprising seventh and eighth S/D metal portions adjacent to a first gate structure in a third row of gate structures, wherein the seventh S/D metal portion is coupled to each of the fourth and sixth S/D metal portions,
- wherein each of the first through eighth S/D metal portions is positioned in a same layer and extends above each of the gate structures in a third direction perpendicular to each of the first and second directions.
Dependencies are inferred from the claim text.