Optical filter and method for manufacturing same
AssigneeNippon Electric Glass Co., Ltd.
InventorsKeiichi Sahara, Masaaki Imura, Takako Tojo
Life of this patent
Estimating the term…
Abstract
Provided is an optical filter capable of reducing the dependency on the angle of light incidence. An optical filter 1 includes a hydrogenated silicon-containing film 4, wherein in a Raman spectrum of the hydrogenated silicon-containing film 4 measured by Raman spectroscopy a ratio (SiH/SiH2) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH2 is 0.7 or more.
Claims6
An optical filter comprising a hydrogenated silicon-containing film, wherein in a Raman spectrum of the hydrogenated silicon-containing film measured by Raman spectroscopy a ratio (SiH/SiH2) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH2 is 0.7 or more.
An optical filter comprising a hydrogenated silicon-containing film, wherein a ratio (H/Si) between a content of hydrogen atoms in the hydrogenated silicon-containing film measured by hydrogen forward scattering spectroscopy and a content of silicon atoms in the hydrogenated silicon-containing film measured by Rutherford backscattering spectroscopy is 0.4 or less.
Dependencies are inferred from the claim text.