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US 12,248,123 B2Granted
Methods of forming an antireflective layer on a complex substrate and complex substrates having the antireflective layer
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsSin-Yen Leo, Peng Jiang, Zhuxiao Gu
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Abstract
Described herein are antireflective layers, methods for forming antireflective layers, and structures including antireflective layers. Methods are included for forming a durable antireflective layer on the surface of a substrate, wherein the substrate has a complex three-dimensional shape, wherein the durable antireflective layer comprises a uniform monolayer of silica nanoparticles interconnected by SiO2, a uniform monolayer of silica nanoparticles bonded to the surface of the substrate, or a combination thereof.
Claims6
A structure comprising:
- a durable antireflective layer disposed directly onto an inner surface and an outer surface of a substrate, wherein:
- the substrate has a three-dimensional shape comprising one or more of a concave inner surface, a convex inner surface, and a polygonal inner surface and one or more of a concave outer surface, a convex outer surface, and a polygonal outer surface,
- the inner surface of the substrate is functionalized to have a positive charge and the durable antireflective layer has a negative charge,
- the durable antireflective layer is electrostatically adsorbed directly onto the inner surface,
- the outer surface of the substrate is functionalized to have a positive charge and the durable antireflective layer has a negative charge,
- the durable antireflective layer is electrostatically adsorbed directly onto the outer surface, and
- the durable antireflective layer comprises a uniform monolayer of silica nanoparticles attached to one or more other silica nanoparticles by SiO2, wherein the uniform monolayer of silica nanoparticles is bonded directly to the inner surface of the substrate surface via a covalent SiO2-particle network, wherein the uniform monolayer of silica nanoparticles is bonded directly to the outer surface of the substrate surface via a covalent SiO2-particle network, wherein the silica nanoparticles have a diameter of about 100 to 200 nm.
4 more elements
Dependencies are inferred from the claim text.