Charged-particle measurement apparatus and control method of charged-particle measurement apparatus

A charged-particle measurement apparatus, comprising

• a plurality of gas detectors in each of which gas for detecting passage of a charged particle is enclosed;
• a trajectory calculator configured to calculate a trajectory of the charged particle based on detection signals outputted from the plurality of gas detectors and each of parameters associated with the plurality of gas detectors;
• a measurer configured to measure an object based on the trajectory of the charged particle, the object being a measurement target;
• a signal intensity acquirer configured to acquire signal intensity of the detection signals;
• an operating state monitor configured to evaluate each of operating states of the plurality of gas detectors based on the signal intensity corresponding to each of the plurality of gas detectors;
• a parameter updating processor configured to update at least one parameter when at least one of the operating states of the plurality of gas detectors associated with this parameter changes;
• and
• a non-measurement region data acquirer configured to acquire at least one detection signal corresponding to a non-measurement region among regions that can be measured by the plurality of gas detectors, the non-measurement region being a region where the object is not set,
• wherein the operating state monitor is configured to evaluate at least one operating state based on the signal intensity of the at least one detection signal corresponding to the non-measurement region.

A charged-particle measurement apparatus, comprising

• a plurality of gas detectors in each of which gas for detecting passage of a charged particle is enclosed;
• a trajectory calculator configured to calculate a trajectory of the charged particle based on detection signals outputted from the plurality of gas detectors and each of parameters associated with the plurality of gas detectors;
• a measurer configured to measure an object based on the trajectory of the charged particle, the object being a measurement target;
• a signal intensity acquirer configured to acquire signal intensity of the detection signals;
• an operating state monitor configured to evaluate each of operating states of the plurality of gas detectors based on the signal intensity corresponding to each of the plurality of gas detectors;
• a parameter updating processor configured to update at least one parameter when at least one of the operating states of the plurality of gas detectors associated with this parameter changes;
• and
• a passing position discriminator configured to identify a passing position of the charged particle in at least one of the plurality of gas detectors,
• wherein the operating state monitor is configured to evaluate at least one operating state based on the signal intensity of at least one detection signal that is outputted at a time when the charged particle passes a preset setting region in a total range of the gas detector.