Optimal parameter selection for structured light metrology

A system comprising:

• a structured light metrology (SLM) scanner;
• and
• one or more processors operatively coupled to the SLM scanner and programmed to cause the system to:
• cause the SLM scanner to acquire a plurality of sets of measurements of an object using an adjustable parameter of the SLM scanner, wherein a different value is used for the adjustable parameter for each of a plurality of test scans;
• for each test scan of the plurality of test scans, compute a value of a quality metric, based on the set of measurements of the object associated with the test scan and a set of simulation data representing a simulated scan of the object by the SLM system, to produce a plurality of quality metric values;
• identify a test scan, of the plurality of test scans, that has a quality metric value that satisfies a specified optimization criterion;
• and
• select a value of the adjustable parameter that was used for the identified test scan, as the optimal value of the adjustable parameter for scanning the object.

An article of manufacture comprising instructions, execution of which by at least one processor in a processing system causes performance of operations including:

• accessing a plurality of sets of measurements of an object, the plurality of sets of measurements having been acquired by a structured light metrology (SLM) system that has an adjustable parameter, wherein a different value was used for the adjustable parameter for each of a plurality of test scans;
• for each test scan of the plurality of test scans, calculating a value of a quality metric, based on the set of measurements of the object associated with the test scan and a set of simulation data representing a simulated scan of the object by the SLM system;
• identifying a test scan, of the plurality of test scans, that has a quality metric value that satisfies a specified optimization criterion;
• and
• selecting a value of the adjustable parameter that was used for the identified test scan, as the optimal value of the adjustable parameter for scanning the object.