Apparatus for electroless metallization of a target surface of at least one workpiece, and method and diffuser plate for this purpose

An apparatus (1) for the electroless metallization of a target surface of a plurality of workpieces (5), comprising:

• a vessel (10) for receiving a metallization solution with an inlet (15) and an outlet (16) for the metallization solution, and
• a holder (20) for holding the plurality of workpieces (5), which can be arranged in the vessel (10),
• wherein a diffuser plate (30) is provided between the at least one inlet (15) and the holder (20), which has a plurality of diffuser openings (35) spaced apart in a plane of a plate (E),
• wherein a movement device (40) is provided, which can move the diffuser plate (30) in at least one direction in space in the vessel (10),
• wherein a first diffuser opening (35), from among the plurality of diffuser openings (35), has:
• a first cross-sectional area (A1) on a first side (31) of the diffuser plate (30), and
• a second cross-sectional area (A2) on a second side (32) of the diffuser plate (30), opposite to the first side (31) thereof,
• wherein the first cross-sectional area (A1) is greater than the second cross-sectional area (A2),
• wherein the second side (32) of the diffuser plate (30) faces the plurality of workpieces (5),
• wherein the first diffuser opening (35) is conical or cone-shaped,
• wherein the diffuser plate (30) is movable in a direction parallel to a normal vector of the plane of a plate (E), and
• wherein the holder (20) is connected to the movement device (40).