Pod cleaning chamber

A POD cleaning chamber comprising:

• a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD;
• a drying chamber including an exit door and drying the separation POD transferred from the cleaning sub-chamber;
• a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend;
• and
• a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber, comprising:
• a jig on which the separation POD is stably mounted, and a moving unit coupled to the jig to move the jig,
• wherein the moving unit is arranged outside the cleaning sub-chamber and the drying chamber,
• wherein the jig comprises a holding jig for supporting the separation POD and a coupling jig for connecting the holding jig to the moving unit,
• wherein the holding jig comprises:
• a first portion coupled to the coupling jig to downward at a right angle,
• a second portion extending from an end of the first portion at an inclination and arrived to the separation POD, and
• support pins provided to be coupled to the second portion and arranged on a lower portion of the second portion to support a lower portion of the separation POD, and arranged on side surfaces of a frame to support both side surfaces of the separation POD and a rear surface thereof,
• wherein the second portion formed to have a rectangular cross-section having a greater size than an external edge of the separation POD so that the holding jig exposed to both the lateral sides of the separation POD.