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US 12,245,353 B2Granted
Irradiator and plasma apparatus
AssigneeSekisui Chemical Co., Ltd.
InventorsTatsuya Matsuo, Yu Nagahara, Takaya Oshita, Naomichi Saitou
Life of this patent
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Abstract
An irradiator includes: a piezoelectric transformer accommodated in a housing; a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer; and an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma. At least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening.
Claims8
An irradiator comprising:
- a piezoelectric transformer accommodated in a housing;
- a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer;
- and
- an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma;
- wherein at least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening;
- and
- the first electrode has a dimension smaller than a dimension of the piezoelectric transformer, in a radial direction perpendicular to an axis of the first electrode.
4 more elements
An irradiator comprising:
- a piezoelectric transformer accommodated in a housing;
- a first electrode connected to the piezoelectric transformer, to which a voltage is applied from the piezoelectric transformer;
- an irradiation opening that ejects at least one of a plasma generated by the first electrode and an active gas generated by the plasma;
- and
- a second electrode opposed to at least a part of the first electrode;
- wherein at least a part of the first electrode is located between the piezoelectric transformer and the irradiation opening;
- and
- the second electrode has a dimension smaller than a dimension of the piezoelectric transformer, in a radial direction perpendicular to an axis of the first electrode.
5 more elements
Dependencies are inferred from the claim text.