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US 12,244,301 B2Granted
Guided acoustic wave device
AssigneeQorvo US, Inc.
InventorsShogo Inoue, Marc Solal
Life of this patent
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Abstract
A guided acoustic wave device includes a substrate, a lithium tantalate layer on the substrate, and a transducer on the lithium tantalate film. The lithium tantalate has a crystalline orientation defined by (YXl)Θ°, where Θ is between 10° and 37°. The inventors discovered that limiting the crystalline orientation of the lithium tantalate in this manner provides significant increases in the electromechanical coupling coefficient of the acoustic wave device, thereby increasing bandwidth and improving performance.
Claims11
A guided acoustic wave device comprising:
- a substrate;
- a lithium tantalate layer on the substrate, the lithium tantalate layer having a first thickness and a crystalline orientation defined by (YXl)Θ°;
- and
- a transducer on the lithium tantalate layer, wherein the transducer is an interdigital transducer that comprises a patterned metal layer having a second thickness (h) and a center frequency wavelength (λ);
- and
- wherein the crystalline orientation of the lithium tantalate layer is defined by (YXl)Θ° where
- 2
-
- 2
- -
- 1.2
- h
- λ
- ≤
- Θ
- ≤
- 37
- +
- 0.6
- h
- λ
- -
- 0
- .
- 0
-
- 8
-
- (
- h
- λ
- )
- 2
- .
31 more elements
A guided acoustic wave device comprising:
- a substrate;
- a lithium tantalate layer on the substrate;
- and
- an interdigital transducer on the lithium tantalate layer, wherein:
- the interdigital transducer comprises a first comb electrode and a second comb electrode;
- a distance between adjacent electrode fingers of one of the first comb electrode and the second comb electrode defines a center frequency wavelength (λ) of the guided acoustic wave device;
- the interdigital transducer comprises a patterned metal layer having a thickness (h);
- and
- a crystalline orientation of the lithium tantalate layer is defined by (YXl)Θ° where
- 2
-
- 2
- -
- 1.2
- h
- λ
- ≤
- Θ
- ≤
- 37
- +
- 0.6
- h
- λ
- -
- 0
- .
- 0
-
- 8
-
- (
- h
- λ
- )
- 2
- .
34 more elements
Dependencies are inferred from the claim text.