Semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakahiro Sato, Yasutaka Nakazawa, Takayuki Cho, Shunsuke Koshioka, Hajime Tokunaga, Masami Jintyou
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakahiro Sato, Yasutaka Nakazawa, Takayuki Cho, Shunsuke Koshioka, Hajime Tokunaga, Masami Jintyou
Estimating the term…
A transistor includes a multilayer film in which an oxide semiconductor film and an oxide film are stacked, a gate electrode, and a gate insulating film. The multilayer film overlaps with the gate electrode with the gate insulating film interposed therebetween. The multilayer film has a shape having a first angle between a bottom surface of the oxide semiconductor film and a side surface of the oxide semiconductor film and a second angle between a bottom surface of the oxide film and a side surface of the oxide film. The first angle is acute and smaller than the second angle. Further, a semiconductor device including such a transistor is manufactured.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.