Optical filter array
AssigneeViavi Solutions Inc.
InventorGeorg J. Ockenfuss
Life of this patent
Estimating the term…
Abstract
A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.
Claims20
A device, comprising:
- a filter array disposed on a substrate,
- the substrate being a glass substrate to be bonded to a sensor element array or a silicon substrate including the sensor element array;
- and
- the filter array including:
- a first mirror disposed on the substrate,
- a plurality of spacer layers,
- a first spacer layer, of the plurality of spacer layers, being disposed on top of the first mirror and covering a set of sensor elements of the sensor element array,
- a second spacer layer, of the plurality of spacer layers, being disposed on top of the first spacer layer and covering a subset of the set of sensor elements, and
- a third spacer layer, of the plurality of spacer layers, being disposed on top of the second spacer layer and covering a subset of the subset of sensor elements,
- each sensor element, of the set of sensor elements, being associated with a spacing of less than approximately 1 micrometer (μm),
- the set of sensor elements comprising a first sensor element and a second sensor element, and
- a distance between the first sensor element and the second sensor element being between approximately 150 nm and 1 μm, and
- a second mirror disposed on the plurality of spacer layers, wherein the second mirror is aligned with the set of sensor elements.
A filter array comprising:
- a mirror layer disposed on a substrate that includes a plurality of sensor elements;
- a first spacer layer disposed on top of the mirror layer and covering a first quantity of sensor elements of the plurality of sensor elements;
- a second spacer layer disposed on top of the first spacer layer and covering a second quantity of sensor elements of the plurality of sensor elements,
- the second quantity of sensor elements being different from the first quantity of sensor elements;
- and
- a third spacer layer disposed on top of the second spacer layer and covering a third quantity of sensor elements of the plurality of sensor elements,
- the third quantity of sensor elements being different from the first quantity of sensor elements and the second quantity of sensor elements.
A device comprising:
- a first mirror layer that covers a plurality of sensor elements;
- a first spacer layer that is deposited on top of the first mirror layer and covers all of the plurality of sensor elements;
- a second spacer layer that is deposited on top of a portion of the first spacer layer and covers half or more of the plurality of sensor elements;
- a third spacer layer that is deposited on top of a portion of the second spacer layer and covers half or less of the plurality of sensor elements;
- and
- a second mirror layer disposed over the third spacer layer.
Dependencies are inferred from the claim text.