Slit diaphragm
AssigneeSingulus Technologies AG
InventorPeter Weipert
Life of this patent
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Abstract
The present invention relates to a slit diaphragm, a slit diaphragm system comprising at least two slit diaphragms arranged adjacent to each other and to a coating module and coating facility comprising a slit diaphragm.
Claims15
A slit diaphragm system comprising at least two slit diaphragms arranged adjacent to each other, wherein each slit diaphragm comprises two movably mounted elongate diaphragm elements each having first and second longitudinal ends, wherein an elongate diaphragm slit of variable width is configured between the two elongate diaphragm elements, wherein the two first longitudinal ends are connected to a rotary drive unit and wherein the two second longitudinal ends are coupled to each other;
- wherein the at least two slit diaphragms arranged adjacent to each other are arranged and configured such that a diaphragm element of a first slit diaphragm in its completely opened state covers an area which is at least partially also covered by a diaphragm element of a second slit diaphragm in its completely opened state.
A coating module comprising a sputtering cathode, a target, a support device and/or transport device for a substrate, and a slit diaphragm which is arranged between the target and the support device and/or transport device and comprises two movably mounted elongate diaphragm elements each having first and second longitudinal ends, wherein an elongate diaphragm slit of variable width is configured between the two elongate diaphragm elements, wherein the two elongate diaphragm elements are rotationally mounted and can be moved by a drive unit such that the longitudinal orientation of the elongate diaphragm slit remains constant for different diaphragm slit widths, wherein the elongate diaphragm slit of variable width can be transferred from a completely closed state to a completely opened state by the drive unit, wherein, in the completely closed state, the two elongate diaphragm elements overlap each other and wherein, in the completely opened state, the two elongate diaphragm elements have a distance of at least 5 cm.
The coating module according to 7, wherein the first longitudinal ends of the two elongate diaphragm elements are attached to a first rotationally mounted element and wherein the second longitudinal ends of the two elongate diaphragm elements are attached to a second rotationally mounted element.
Dependencies are inferred from the claim text.