Method, apparatus, and program for determining condition related to captured image of charged particle beam apparatus

A computer comprising:

• a processor;
• and
• a storage medium that stores a program, wherein
• the processor acquires a plurality of captured images by executing the program,
• each of the plurality of captured images is an image generated by irradiating a pattern formed on a wafer with a charged particle beam, and detecting electrons emitted from the pattern,
• each of the plurality of captured images is an image captured according to one or more imaging conditions,
• by executing the program, the processor further
• acquires teaching information for each of the plurality of captured images,
• acquires one or more feature determination conditions, and
• calculates a feature for each of the plurality of captured images based on each of the one or more feature determination conditions,
• at least one of the one or more imaging conditions and the feature determination condition being plural,
• by executing the program, the processor still further
• acquires a regression curve of the feature and the teaching information based on the plurality of captured images under each of condition sets each including a combination of the one or more imaging conditions and the one or more feature determination conditions, and
• selects one or more of the condition sets based on the regression curve.