Method for manufacturing cured film and use of the same

A method for manufacturing a resist layer above a cured film comprising:

• (1) applying a composition (i) above a substrate;
• (2) forming a hydrocarbon-containing film from the composition (i);
• and
• (3) irradiating the hydrocarbon-containing film with plasma, electron beam and/or ion to form a cured film,
• provided that the composition (i) comprises a hydrocarbon-containing compound (A) and a solvent (B);
• and
• the hydrocarbon-containing compound (A) comprises a structural unit (A1-1) represented by the following formula (A1-1):
• wherein,
• Ar21 is a C6-50 aromatic hydrocarbon group;
• R21 is a C6-50 aromatic hydrocarbon group, hydrogen, or a single bond bonded to another structural unit;
• n21 is 0;
• wherein R22 and R23 are not present;
• wherein a single bond connects the two phenyl rings;
• where, Ar21, and R21 contain no fused aromatic ring;
• R12 is I, Br or CN;
• p11 is a number of 0 to 5, p12 is a number of 0 to 1, q11 is 0, r11 is a number of 0 to 5, s11 is a number of 0 to 5;
• and
• p11, q11 and r11 do not become 0 simultaneously in one structural unit;
• where, the intensity ratio of G band and D band R=ID/IG in Raman spectroscopy (measured with laser wavelength of 514.5 nm) of the cured film formed in the process (3) is 0.35 to 0.90;
• wherein the hydrocarbon-containing compound (A) is a polymer comprising an aldehyde derivative when the polymer is synthesized from 0 to 30 mol % based on the sum of all components used in the synthesis;
• wherein the process (3) comprises the following conditions:
• in the case of plasma irradiation:
• the atmosphere is N2, NF3, H2, fluorocarbon, rare gas, or a mixture of any of these;
• and/or
• the RF discharge power is 1,000 to 10,000 W,
• in the case of electron beam irradiation:
• the acceleration voltage is 2 to 200 kV, and/or
• the irradiation amount is 100 to 5,000 kGy,
• in the case of ion irradiation:
• the elemental species of the ion to be irradiated is hydrogen, boron, carbon, nitrogen, rare gas, or a mixture of any of these;
• the acceleration voltage is 3 to 1000 kV;
• and/or
• the irradiation amount is 1013 to 1018 ion/cm2.