Inspection apparatus and inspection method
AssigneeCanon Anelva Corporation
InventorTakeo Tsukamoto
Life of this patent
Estimating the term…
Abstract
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.
Claims23
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, comprising:
- an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane;
- and
- an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface,
- wherein the X-ray detector includes a long X-ray receiver.
An inspection apparatus for inspecting an inspection target object having a first inspection target surface and a second inspection target surface, comprising:
- an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object;
- and
- an X-ray detector including an X-ray receiver configured to receive X-rays emitted from a foreign substance existing on the first inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the first inspection target surface and X-rays emitted from a foreign substance existing on the second inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the second inspection target surface,
- wherein the X-ray receiver is arranged to intersect a first virtual plane including the first inspection target surface and a second virtual plane including the second inspection target surface.
An inspection method of inspecting an inspection target surface arranged on an inspection plane, comprising:
- an X-ray detection step of emitting X-rays to the inspection plane and detecting, by an X-ray detector including a long X-ray receiver, X-rays emitted from a foreign substance existing on the inspection target surface and totally reflected by the inspection target surface;
- and
- a processing step of processing an output of the X-ray detector.
Dependencies are inferred from the claim text.