Vacuum valve for providing a symmetrical fluid flow

A regulating vacuum valve configured to regulate a volumetric or mass flow and interrupt a flow path in a gas-tight manner, comprising:

• a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening;
• a first valve disk having a first contact surface corresponding to the first sealing surface;
• and
• a drive unit coupled to the first valve disk and configured to be adjusted at least from, an open position wherein the first valve disk and the first valve seat are in contactless relationship relative to each other, to
• a closing position wherein a gas-tight axially sealing contact exists between the first sealing surface and the first contact surface via an intermediate sealing element, and to the open position,
• wherein the regulating vacuum valve at least comprises:
• a second valve seat having a second valve opening defining a second opening axis and a second sealing surface surrounding the second valve opening;
• and
• a second valve disk having a second contact surface corresponding to the second sealing surface,
• wherein an overall valve opening of the regulating vacuum valve is formed by at least the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening,
• wherein the regulating vacuum valve comprises a third valve seat having a third valve opening defining a third opening axis and a third sealing surface surrounding the third valve opening, and a third valve disk having a third contact surface corresponding to the third sealing surface, wherein the overall valve opening is additionally formed by the third valve opening as a third valve partial opening, and
• wherein the first valve seat, the second valve seat and the third valve seat are inclined relative to each other and are oriented as side faces of a pyramid.