Holding system for holding substrates during a processing of the surfaces of the substrates
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsMax Siebert, Jens Eggemann, Christian Becker, Dieter Mueller
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Abstract
The invention relates to a holding system (1) for holding substrates (12) for use in a surface processing system having a covering area (20), comprising a plurality of fixing elements (2), a body (24) arranged within the covering area (20) for receiving the fixing elements (2), and a positioning element (26) for adjusting the covering and a machining area (20, 22), wherein a plurality of substrates (12) can be fixed by the fixing elements (2) and processed within the machining area (22).
Claims19
A holding system for holding substrates for use in a surface treatment system having a cover area, comprising,
- a plurality of fixing elements,
- a body arranged within the cover area for receiving the fixing elements,
- a positioning element for adjusting the covering area and a machining area,
- wherein a plurality of the substrates can be fixed by the fixing elements and processed within the machining area.
Dependencies are inferred from the claim text.