Method for producing a sequencing unit for sequencing a biochemical material and sequencing unit
AssigneeRobert Bosch GmbH
InventorFranz Laermer
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Abstract
The disclosure relates to a method for producing a sequencing unit for sequencing a biochemical material. In this case, at least one sequencing pore for sequencing the biochemical material in a precursor layer is created in a thermal lithography process in order to produce a pre-structured layer. The pre-structured layer is then converted into a graphene layer by heating to a conversion temperature in order to produce the sequencing unit. The sequencing pore is reduced to a size suitable for sequencing, depending on the transformation temperature.
Claims16
A method for producing a sequencing unit for sequencing a biochemical material, the method comprising:
- providing a graphene precursor layer;
- forming at least one pore in the graphene precursor layer using thermal lithography;
- thermally converting the graphene precursor layer with the at least one pore into a graphene layer by controlled heating of the graphene precursor layer to a selected conversion temperature using controlled annealing, thereby configuring the at least one pore as an at least one sequencing pore for sequencing the biochemical material;
- arranging a respective electrode at a respective opening of the at least one pore;
- and
- covering the graphene layer with a counter electrode.
Dependencies are inferred from the claim text.