Tiles having multiple cooling cells for MEMS-based cooling

A method, comprising:

• providing a plurality of cooling cells, each of the plurality of cooling cells including a support structure and a cooling element, the cooling element having a central region having an axis and a perimeter, the plurality of cooling cells including a first cooling cell, a second cooling cell, a third cooling cell, and a fourth cooling cell, the cooling element being supported by the support structure at the central region and along the axis, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure, wherein a first portion of the plurality of cooling cells includes the first cooling cell and the second cooling cell, wherein the first cooling cell is physically connected to the second cooling cell, and wherein the first cooling cell and the second cooling cell are aligned along the axis such that the plurality of cooling cells form an integrated cooling cell tile;
• providing a plurality of integrated tabs mechanically connecting a second portion of the plurality of cooling cells, wherein the second portion includes the third cooling cell and the fourth cooling cell;
• and
• providing an electrical connector including at least one longitudinal electrical connector extending along the axis and coupled to the first portion of the plurality of cooling cells along the axis.