Substrate processing device and control method for substrate processing device
AssigneeSemes Co., Ltd.
InventorsSang Min Ha, Hyeong Jun Cho, Jae Hong Kim, Sang Hyun Son, Young-Joo Seo
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AssigneeSemes Co., Ltd.
InventorsSang Min Ha, Hyeong Jun Cho, Jae Hong Kim, Sang Hyun Son, Young-Joo Seo
Estimating the term…
Disclosed is a substrate processing device which includes a substrate transfer part on which a transfer object is received and a jetting system part includes an ink jet body that jets and prints ink on the transfer object over an upper surface of the substrate transfer part, an ink module transfer part that transfers the ink jet body, an encoder disposed around the ink module transfer part to output a movement signal per unit movement distance of the ink module transfer part, an ink ejection controller that interworks with the ink jet body to control an ink jetting timing of the ink jet body, and a signal splitter that interworks with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the movement signal, the width of which is reset, to the ink ejection controller.
A substrate processing device, comprising:
A substrate processing device, comprising:
Dependencies are inferred from the claim text.