Back to results
US 12,239,935 B2Granted
Methods and systems for adsorbing organometallic vapor
AssigneeEntegris, Inc.
InventorsCharles H. Applegarth, Rocky D. Gipson, Sarah Vogt, Joshua T. Cook, Matthew Browning, Marco Holzner
Life of this patent
Estimating the term…
Abstract
Described are methods, devices, and systems useful for adsorbing organometallic vapor onto solid adsorbent material to remove the organometallic vapor from a gas mixture that contains the organometallic vapor and other vapor, particulate materials, or both.
Claims13
A system for filtering a gas mixture comprising organometallic vapor, particles, and non-organometallic vapor, the system comprising:
- a heat exchanger,
- a particle filter, and
- a solid adsorbent,
- the system arranged to allow flow of the gas mixture through the heat exchanger to cool the gas mixture, through the particle filter to remove particles from the gas mixture, and through the solid adsorbent to remove organometallic vapor from the gas mixture;
- wherein the heat exchanger is a counterflow coil heat exchanger comprising:
- a heat exchanger body comprising a body inlet, a body outlet, and a body interior volume, and
- a hollow coil body located within the heat exchanger body interior volume and comprising a coil inlet, a coil outlet, and multiple coil turns between the coil inlet and the coil outlet, wherein:
- the gas mixture enters the heat exchanger body at the body inlet, flows through the interior volume and over an exterior surface of the hollow coil, and exits the heat exchanger body at the body outlet, and
- a cooling liquid enters the hollow coil body at the coil inlet, flows through the hollow coil body in a direction opposite of a direction of flow of the gas mixture passing through the heat exchanger body, and exits the hollow coil body at the coil outlet.
6 more elements
A system for filtering a gas mixture comprising organometallic vapor, particles, and non-organometallic vapor, the system comprising:
- a heat exchanger,
- a particle filter, and
- a solid adsorbent,
- the system arranged to allow flow of the gas mixture through the heat exchanger to cool the gas mixture, through the particle filter to remove particles from the gas mixture, and through the solid adsorbent to remove organometallic vapor from the gas mixture;
- wherein the particle filter comprises a multi-stage filter comprising:
- an impaction stage,
- a carbon fiber collection stage,
- a tortuous path stage, and
- a fiber media stage.
6 more elements
Dependencies are inferred from the claim text.