Bi-directional vertical cavity surface emitting lasers
AssigneeLumentum Operations LLC
InventorBenjamin Kesler
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Abstract
In some implementations, a vertical cavity surface emitting laser (VCSEL) device includes a substrate layer and a first set of epitaxial layers for a bottom-emitting VCSEL disposed on the substrate layer. The first set of epitaxial layers may include a first set of mirrors and at least one first active layer. The VCSEL device may include a second set of epitaxial layers for a top-emitting VCSEL disposed on the first set of epitaxial layers for the bottom-emitting VCSEL. The second set of epitaxial layers may include a second set of mirrors and at least one second active layer. The top-emitting VCSEL and the bottom-emitting VCSEL may be configured to emit light in opposite light emission directions.
Claims20
A method, comprising:
- growing, on a substrate, a first set of epitaxial layers for a bottom-emitting vertical cavity surface emitting laser (VCSEL), the first set of epitaxial layers comprising:
- a first set of mirrors;
- and
- at least one first active layer;
- growing, on the first set of epitaxial layers, a second set of epitaxial layers for a top-emitting VCSEL, the second set of epitaxial layers comprising:
- a second set of mirrors;
- and
- at least one second active layer;
- and
- etching the second set of epitaxial layers until a surface of the first set of epitaxial layers is exposed,
- wherein the top-emitting VCSEL and the bottom-emitting VCSEL are configured to emit light in opposite light emission directions.
A method, comprising:
- growing, on a substrate, a first set of epitaxial layers for a plurality of bottom-emitting vertical cavity surface emitting lasers (VCSELs), the first set of epitaxial layers comprising:
- a first set of mirrors;
- and
- at least one first active layer;
- growing, on the first set of epitaxial layers, a second set of epitaxial layers for a plurality of top-emitting VCSELs, the second set of epitaxial layers comprising:
- a second set of mirrors;
- and
- at least one second active layer;
- and
- etching the second set of epitaxial layers until a surface of the first set of epitaxial layers is exposed,
- wherein the plurality of top-emitting VCSELs and the plurality of bottom-emitting VCSELs are configured to emit light in opposite light emission directions.
A method, comprising:
- growing, on a substrate layer, a first set of epitaxial layers for a bottom-emitting vertical cavity surface emitting laser (VCSEL), the first set of epitaxial layers comprising:
- a first set of mirrors;
- and
- at least one first active layer;
- growing, on the first set of epitaxial layers, a second set of epitaxial layers for a top-emitting VCSEL, the second set of epitaxial layers comprising:
- a second set of mirrors;
- and
- at least one second active layer;
- and
- etching the second set of epitaxial layers until a surface of the first set of epitaxial layers is exposed,
- wherein a surface of the substrate layer opposite the first set of epitaxial layers comprises an optical element.
Dependencies are inferred from the claim text.