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US 12,237,435 B2Granted
Method for manufacturing substrate for solar cell and substrate for solar cell
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiroyuki Otsuka, Shozo Shirai
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Abstract
A solar cell includes a light-receiving surface electrode formed on a light-receiving surface, a back surface electrode formed on a backside, and a CZ silicon single crystal substrate doped with gallium. The CZ silicon single crystal substrate contains 12 ppm or more oxygen atoms. A spiral oxygen-induced defect is not observed in an EL (electroluminescence) image of the solar cell.
Claims1
A method for manufacturing a solar cell, comprising:
- preparing a Czochralski silicon single crystal ingot doped with a p-type dopant or an n-type dopant and containing oxygen atoms of at least 12 ppm;
- preparing a silicon substrate from the Czochralski silicon single crystal ingot;
- subjecting the silicon substrate to low temperature thermal treatment at a temperature of 800° C. or more and less than 1200° C. so as to fabricate a solar cell,
- wherein either the Czochralski silicon single crystal ingot, or the silicon substrate, is subjected to, before the low temperature thermal treatment, high temperature thermal treatment at a temperature of more than 1200° C. for 5 minutes or more and 30 minutes or less, so that oxide precipitate nuclei are dissolved and a homogenous solid solution of oxide precipitate nuclei is formed throughout the silicon substrate;
- subjecting the silicon substrate to texture etching before the high temperature thermal treatment;
- and
- subjecting the fabricated solar cell to an electroluminescence image test to check that spiral oxygen-induced defect patterns are not observed;
- wherein the conversion efficiency of the solar cell in which the spiral oxygen-induced defect patterns are not observed in the electroluminescence image test is about 20% and the variation thereof is about 0.1%.
5 more elements
Dependencies are inferred from the claim text.