Substrate transporter and substrate processing apparatus including substrate transporter

A substrate conveying apparatus for conveying a rectangular substrate, the substrate conveying apparatus comprising:

• a plurality of conveyance rollers configured to support a lower surface of the substrate;
• a plurality of roller shafts to which the plurality of conveyance rollers are mounted;
• a motor configured to rotate the plurality of roller shafts;
• and
• a pusher for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers, wherein
• the pusher includes a stage configured to pass through a clearance between the plurality of roller shafts,
• the pusher is configured to be able to hand over the rectangular substrate to a top ring,
• the stage of the pusher includes a plurality of support pillars, and
• the plurality of support pillars includes four support pillars, one of each of the four support pillars located at one of four corners of the pusher, and each of the four support pillars includes a support surface for supporting the top ring and an inclined surface for guiding the top ring.