Laser machining apparatus and laser machining method
AssigneeSamsung Display Co., Ltd.
InventorsHeung Yeol Na, Tae Hun Kim, Jung Woo Choi
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Abstract
A laser machining apparatus includes, a processing chamber, a window disposed in a surface of the processing chamber, a substrate carrier disposed inside the processing chamber and facing the window, a laser irradiator which irradiates a laser onto the substrate carrier through the window, a protector supplier disposed on a side of the processing chamber, a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber, and a protector which connects the protector supplier with the protector retriever, where at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.
Claims20
A laser machining apparatus comprising:
- a processing chamber;
- a window disposed in a surface of the processing chamber;
- a substrate carrier disposed inside the processing chamber and facing the window;
- a laser irradiator which irradiates a laser onto the substrate carrier through the window;
- a protector supplier disposed on a side of the processing chamber;
- a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber;
- and
- a protector which connects the protector supplier with the protector retriever, wherein at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.
A laser machining apparatus comprising:
- a processing chamber comprising a process area in which a target substrate is processed, and a first gate through which the target substrate is loaded into the process area in a first direction;
- a laser irradiator which irradiates a laser onto the process area in a second direction intersecting the first direction;
- and
- a protector driver which provides a protector into the processing chamber in a third direction intersecting the first direction and the second direction.
Dependencies are inferred from the claim text.